A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames; Sensor Review; Vol. 39, iss. 5
| Parent link: | Sensor Review Vol. 39, iss. 5.— 2019.— [P. 670-681] |
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| Institution som forfatter: | |
| Andre forfattere: | , , , , , , , , |
| Summary: | Title screen Purpose Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer. Design/methodology/approachThe finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes. FindingsExperimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes.Originality/value This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers. Режим доступа: по договору с организацией-держателем ресурса |
| Sprog: | engelsk |
| Udgivet: |
2019
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| Fag: | |
| Online adgang: | https://doi.org/10.1108/SR-05-2018-0133 |
| Format: | Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662510 |
MARC
| LEADER | 00000naa0a2200000 4500 | ||
|---|---|---|---|
| 001 | 662510 | ||
| 005 | 20250404095441.0 | ||
| 035 | |a (RuTPU)RU\TPU\network\33665 | ||
| 035 | |a RU\TPU\network\33485 | ||
| 090 | |a 662510 | ||
| 100 | |a 20200827d2019 k||y0rusy50 ba | ||
| 101 | 0 | |a eng | |
| 102 | |a GB | ||
| 135 | |a drcn ---uucaa | ||
| 181 | 0 | |a i | |
| 182 | 0 | |a b | |
| 200 | 1 | |a A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames |f P. F. Baranov, T. G. Nesterenko, E. S. Barbin [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 330 | |a Purpose Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer. Design/methodology/approachThe finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes. FindingsExperimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes.Originality/value This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Sensor Review | ||
| 463 | |t Vol. 39, iss. 5 |v [P. 670-681] |d 2019 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a MEMS | |
| 610 | 1 | |a accelerometers | |
| 610 | 1 | |a decoupling frames | |
| 610 | 1 | |a electromechanical sensors | |
| 610 | 1 | |a gyroscopes | |
| 610 | 1 | |a микроэлектромеханические гироскопы | |
| 610 | 1 | |a акселерометры | |
| 701 | 1 | |a Baranov |b P. F. |c specialist in the field of control and measurement equipment |c Associate Professor of Tomsk Polytechnic University, Candidate of technical sciences |f 1987- |g Pavel Fedorovich |3 (RuTPU)RU\TPU\pers\34618 |9 17980 | |
| 701 | 1 | |a Nesterenko |b T. G. |c specialist in the field of mechanical engineering |c Associate Professor of Tomsk Polytechnic University, Candidate of technical sciences |f 1946- |g Tamara Georgievna |3 (RuTPU)RU\TPU\pers\30970 |9 15208 | |
| 701 | 1 | |a Barbin |b E. S. |c specialist in the field of instrument engineering |c engineer of Tomsk Polytechnic University |f 1988- |g Evgeny Sergeevich |3 (RuTPU)RU\TPU\pers\36470 |9 19519 | |
| 701 | 1 | |a Koleda |b A. N. |c Specialist in the field of instrument making |c Engineer of Tomsk Polytechnic University |f 1985- |g Aleksey Nikolaevich |3 (RuTPU)RU\TPU\pers\33286 |9 17031 | |
| 701 | 1 | |a Tanaka |b S. |g Shuji | |
| 701 | 1 | |a Tsukamoto |b T. |g Takashiro | |
| 701 | 1 | |a Kulinich |b I. |g Ivan | |
| 701 | 1 | |a Zykov |b D. |g Dmitry | |
| 701 | 1 | |a Shelupanov |b A. |g Aleksandr | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа неразрушающего контроля и безопасности |b Отделение электронной инженерии |3 (RuTPU)RU\TPU\col\23507 |9 28323 |
| 801 | 2 | |a RU |b 63413507 |c 20200827 |g RCR | |
| 856 | 4 | |u https://doi.org/10.1108/SR-05-2018-0133 | |
| 942 | |c CF | ||