Tribological and mechanical properties of diamond films synthesized with high methane concentration; International Journal of Refractory Metals and Hard Materials; Vol. 85

Tribological and mechanical properties of diamond films synthesized with high methane concentration; International Journal of Refractory Metals and Hard Materials; Vol. 85

Détails bibliographiques
Parent link:International Journal of Refractory Metals and Hard Materials
Vol. 85.— 2019.— [105057, 6 p.]
Auteur principal: Gaydaychuk A. V. Alexander Valerievich
Collectivité auteur: Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
Autres auteurs: Linnik S. A. Stepan Andreevich
Résumé:Title screen
Ultrananocrystalline diamond films are synthesized on Si substrate by HFCVD method with a high methane concentration (up to 23.1 vol%) in the gas mixture. The morphology and structural properties of the grown diamond films are analyzed using scanning electron microscope (SEM), atomic force microscope (AFM), X-ray diffraction and Raman spectroscopy. It is shown that the surface roughness, crystallite size, hardness and friction coefficient of the obtained films decrease with increasing methane content in the gas mixture. The relationship between the CoF and the wear rate of diamond films is also analyzed. It is found that by reducing the CoF from 0.11 to 0.067, wear rate of the obtained films increases from 0.08 to 7.11 × 10−10 m3 N−1 m−1.
Режим доступа: по договору с организацией-держателем ресурса
Langue:anglais
Publié: 2019
Sujets:
электронный ресурс
труды учёных ТПУ
ultrananocrystalline diamond film
CoF
wear rate
HFCVD
алмазные пленки
Accès en ligne:https://doi.org/10.1016/j.ijrmhm.2019.105057
Format: Électronique Chapitre de livre
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662250

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