Tribological and mechanical properties of diamond films synthesized with high methane concentration

Dades bibliogràfiques
Parent link:International Journal of Refractory Metals and Hard Materials
Vol. 85.— 2019.— [105057, 6 p.]
Autor principal: Gaydaychuk A. V. Alexander Valerievich
Autor corporatiu: Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
Altres autors: Linnik S. A. Stepan Andreevich
Sumari:Title screen
Ultrananocrystalline diamond films are synthesized on Si substrate by HFCVD method with a high methane concentration (up to 23.1 vol%) in the gas mixture. The morphology and structural properties of the grown diamond films are analyzed using scanning electron microscope (SEM), atomic force microscope (AFM), X-ray diffraction and Raman spectroscopy. It is shown that the surface roughness, crystallite size, hardness and friction coefficient of the obtained films decrease with increasing methane content in the gas mixture. The relationship between the CoF and the wear rate of diamond films is also analyzed. It is found that by reducing the CoF from 0.11 to 0.067, wear rate of the obtained films increases from 0.08 to 7.11 × 10−10 m3 N−1 m−1.
Режим доступа: по договору с организацией-держателем ресурса
Idioma:anglès
Publicat: 2019
Matèries:
Accés en línia:https://doi.org/10.1016/j.ijrmhm.2019.105057
Format: Electrònic Capítol de llibre
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662250

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