Plasma-assisted deposition of a three-layer structure by vacuum and gas arcs; IEEE Transactions on Plasma Science; Vol. 26, № 6

Plasma-assisted deposition of a three-layer structure by vacuum and gas arcs; IEEE Transactions on Plasma Science; Vol. 26, № 6

Bibliographische Detailangaben
Parent link:IEEE Transactions on Plasma Science.— , 1973-
Vol. 26, № 6.— 1998.— [P. 1680-1684]
Körperschaft: Национальный исследовательский Томский политехнический университет (ТПУ)
Weitere Verfasser: Borisov D. P., Goncharenko I. M., Koval N. N. Nikolay Nikolaevich, Schanin P. M.
Zusammenfassung:Title screen.
The durability and adhesion of thin coatings often depends on the structure and properties of the layer intermediate between the coating and the substrate, especially in the case where the layer and the substrate are highly different in microhardness. With a vacuum arc and a hot-cathode arc, a process has been arranged which involves cleaning of the surface, nitration of the article, and deposition of a coating. As a result, a three-layer composition has been produced which consists of a TiN layer of thickness up to 5 ?m and microhardness 20 GPa, an intermediate Fe4N layer of thickness up to 8 ?m and microhardness 7.5 GPa, and a nitrated layer of thickness up to 100 ?m with a gradually varying microhardness. With the TiN layer showing high adhesion, the coating has a durability three of four times greater than that of a coating produced with the use of a conventional technology.
Режим доступа: по договору с организацией-держателем ресурса
Sprache:Englisch
Veröffentlicht: 1998
Schlagworte:
электронный ресурс
труды учёных ТПУ
соединения железа
плазма
Online-Zugang:http://dx.doi.org/10.1109/27.747886
Format: Elektronisch Buchkapitel
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662227

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