Formation of high-intensity axially symmetric and ribbon beams of low-energy metal ions; Review of Scientific Instruments; Vol. 91, iss. 1

Formation of high-intensity axially symmetric and ribbon beams of low-energy metal ions; Review of Scientific Instruments; Vol. 91, iss. 1

Detalles Bibliográficos
Parent link:Review of Scientific Instruments
Vol. 91, iss. 1.— 2020.— [013301, 5 p.]
Autor Corporativo: Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научная лаборатория высокоинтенсивной имплантации ионов
Outros autores: Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich, Shevelev A. E. Aleksey Eduardovich, Modebadze G. S. Georgy Slavovich
Summary:Title screen
Low-energy metal ion beams are of considerable interest in developing a high-intensity implantation method that modifies the elemental composition, microstructure, and properties of various materials at depths many times exceeding the projective range of ions. This study presents the results of experiments on plasma-immersion formation followed by spherical and cylindrical ballistic focusing of aluminum and titanium ion beams. The features of the formation, transport, and ballistic focusing of an ion beam are discussed based on the parameters of the vacuum-arc plasma, conditions of its preliminary injection into the drift space and beam focusing, amplitude, duration, and frequency of the bias potential pulses. The optimal conditions to form high-intensity beams of metal ions purified from the macroparticle debris of a vacuum-arc with a current of higher than 1 A and a current density of up to 0.5 A/cm2 are determined
Режим доступа: по договору с организацией-держателем ресурса
Idioma:inglés
Publicado: 2020
Subjects:
электронный ресурс
труды учёных ТПУ
высокоинтенсивные пучки
низкие энергии
Acceso en liña:https://doi.org/10.1063/1.5128422
Formato: Electrónico Capítulo de libro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=662127

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