Structural-Phase State of the Zr-Y-O Layer in the Zr-Y-O/Si Al-N Coating at Long Annealing using "in-situ" Observation
| Parent link: | AIP Conference Proceedings Vol. 2167 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 (AMHS'19).— 2019.— [020096, 4 p.] |
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| Autor Corporativo: | |
| Outros Autores: | , , , , |
| Resumo: | Title screen TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O/Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °С for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °С after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further. Режим доступа: по договору с организацией-держателем ресурса |
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2019
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| Acesso em linha: | https://doi.org/10.1063/1.5131963 |
| Formato: | Recurso Electrónico Capítulo de Livro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=661483 |
| Resumo: | Title screen TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O/Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °С for 20-120 min leads to a change in the structural-phase state. The untransformable t' phase appears at a temperature of 900 °С after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1063/1.5131963 |