Formation of Cr-Zr gradient layer by magnetron sputtering and ion mixing
| Parent link: | MATEC Web of Conferences Vol. 298 : International Conference on Modern Trends in Manufacturing Technologies and Equipment: Mechanical Engineering and Materials Science (ICMTMTE 2019).— 2019.— [00088, 6 p.] |
|---|---|
| Autor corporatiu: | Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики, Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга |
| Altres autors: | Kashkarov E. B. Egor Borisovich, Sidelev D. V. Dmitry Vladimirovich, Rombaeva M. R. Mayya Ramazanovna, Kudiyarov V. N. Victor Nikolaevich, Lomygin A. D. Anton Dmitrievich |
| Sumari: | Title screen The gradient Cr-Zr layer was formed onto Zr-1Nb substrate by magnetron sputtering of chromium and zirconium targets and ion mixing (Ar+ with 25 keV). The distribution of Cr and Zr elements in the deposited coatings was measured by using a glow discharge optical emission spectroscopy. The optimal ion fluence onto the substrate was 8×1019 ion/m2. At higher ion dose, the intensive sputtering of the deposited coating was observed. |
| Idioma: | anglès |
| Publicat: |
2019
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| Matèries: | |
| Accés en línia: | https://doi.org/10.1051/matecconf/201929800088 |
| Format: | Electrònic Capítol de llibre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=661369 |
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