Formation of Cr-Zr gradient layer by magnetron sputtering and ion mixing
| Parent link: | MATEC Web of Conferences Vol. 298 : International Conference on Modern Trends in Manufacturing Technologies and Equipment: Mechanical Engineering and Materials Science (ICMTMTE 2019).— 2019.— [00088, 6 p.] |
|---|---|
| Nhiều tác giả của công ty: | , |
| Tác giả khác: | , , , , |
| Tóm tắt: | Title screen The gradient Cr-Zr layer was formed onto Zr-1Nb substrate by magnetron sputtering of chromium and zirconium targets and ion mixing (Ar+ with 25 keV). The distribution of Cr and Zr elements in the deposited coatings was measured by using a glow discharge optical emission spectroscopy. The optimal ion fluence onto the substrate was 8×1019 ion/m2. At higher ion dose, the intensive sputtering of the deposited coating was observed. |
| Được phát hành: |
2019
|
| Những chủ đề: | |
| Truy cập trực tuyến: | https://doi.org/10.1051/matecconf/201929800088 |
| Định dạng: | Điện tử Chương của sách |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=661369 |
| Tóm tắt: | Title screen The gradient Cr-Zr layer was formed onto Zr-1Nb substrate by magnetron sputtering of chromium and zirconium targets and ion mixing (Ar+ with 25 keV). The distribution of Cr and Zr elements in the deposited coatings was measured by using a glow discharge optical emission spectroscopy. The optimal ion fluence onto the substrate was 8×1019 ion/m2. At higher ion dose, the intensive sputtering of the deposited coating was observed. |
|---|---|
| DOI: | 10.1051/matecconf/201929800088 |