$Role of the strained substrate in the x-ray diffraction of free-standing epitaxial nanostructures under grazing incidence conditions; Physical Review B; Vol. 99, iss. 19$

Role of the strained substrate in the x-ray diffraction of free-standing epitaxial nanostructures under grazing incidence conditions; Physical Review B; Vol. 99, iss. 19

Bibliographic Details
Parent link:	Physical Review B: Condensed Matter and Materials Physics Vol. 99, iss. 19.— 2019.— [195432, 10 p.]
Corporate Author:	Национальный исследовательский Томский политехнический университет Институт неразрушающего контроля Международная научно-образовательная лаборатория неразрушающего контроля
Other Authors:	Lazarev S. V. Sergey Vladimirovich, Schroth Ph. Philipp, Grigoriev D. D. Daniil, Riotte M., Slobodskyy T. Taras, Minkevich A. A. Andrey, Hu Dongzhi, Schaadt D. M. Daniel, Baumbach T. Tilo
Summary:	Title screen Semiconductor heteronanostructures are of interest for a vast field of applications in optoelectronics. Fast and reliable characterization of their structural properties is of high importance for industry and science. By the example of free-standing In0.6Ga0.4As quantum dots (QDs), we discuss the contributions of the strained epitaxial surface nanostructures and the substrate to the scattered x-ray intensity under grazing incidence conditions. In the frame of the distorted wave Born approximation, we take into account multiple scattering and coherent interactions of the x-ray beams involved in the diffraction process. Employing the finite-element method, we give a detailed analysis of the strain distribution inside the nanostructure and the substrate. Further, analyzing the experimental and simulated x-ray diffraction patterns in x-ray grazing incidence diffraction, we demonstrate the importance of accounting for strain in the substrate and interference effects between the surface and the QDs for strain analysis of the nano-objects. The advantages of our approach are demonstrated by comparison with the standard isostrain approach that is commonly used for strain analysis of the nanostructures. We show that neglecting the substrate contribution to the x-ray scattering causes errors in the standard isostrain approach. Finally, the substrate contribution itself may yield information sufficient for a novel and fast approach for the structural characterization of strained semiconductor heteronanostructures. Режим доступа: по договору с организацией-держателем ресурса
Language:	English
Published:	2019
Subjects:	электронный ресурс труды учёных ТПУ субстраты дифракция рентгеновские лучи эпитаксильные слои наноструктура падение
Online Access:	https://doi.org/10.1103/PhysRevB.99.195432
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=661302