The Phase Composition and Structure of Silicon-Carbon Coatings

The Phase Composition and Structure of Silicon-Carbon Coatings

Bibliographic Details
Parent link:	Materials Science Forum: Scientific Journal Vol. 970 : Modern Problems in Materials Processing, Manufacturing, Testing and Quality Assurance II.— 2019.— [P. 283-289]
Corporate Author:	Национальный исследовательский Томский политехнический университет Инженерная школа неразрушающего контроля и безопасности Отделение контроля и диагностики
Other Authors:	Rudenkov A. S. Alexander, Rogachev A. V. Aleksandr Vladimirovich, Kupo A. N. Alexander, Luchnikov P. A. Petr, Chicherina N. V. Natality Viktorovna
Summary:	Title screen The effect of the formation and heat treatment modes of silicon-carbon coatings deposited by ion-beam sputtering of silicon carbide on their morphology, chemical and phase composition is determined. It has been established that an increase in the power of the ion source from 432 W to 738 W leads to a decrease in the sp3/sp2 phase ratio by 1.7 times and an increase in the ratio of Si-C/Si-O bonds by 1.9 times. It is shown that doping of carbon coatings with silicon carbide increases their heat resistance. Режим доступа: по договору с организацией-держателем ресурса
Published:	2019
Subjects:	электронный ресурс труды учёных ТПУ Carbon Ion Beam Sputtering Phase Composition Raman Spectroscopy Roughness углерод фазовый состав ионно-лучевое распыление рамановская спектроскопия шероховатость кремний покрытия карбид кремния термостойкость
Online Access:	https://doi.org/10.4028/www.scientific.net/MSF.970.283
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660941

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