Structure and Phase Composition of Multilayer AlN/SiN Films Irradiated with Helium Ions

Structure and Phase Composition of Multilayer AlN/SiN Films Irradiated with Helium Ions

Bibliographic Details
Parent link:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Vol. 12, iss. 6.— 2018.— [P. 1165-1169]
Corporate Author: Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
Other Authors: Uglov V. V. Vladimir Vasilievich, Shimanskii V. I. Vitali Igorevich, Korenevsky E. L. Egor Leonidovich, Remnev G. E. Gennady Efimovich, Kvasov N. T. Nikolay Trafimovich
Summary:Title screen
The results of investigating the microstructure and phase composition of AlN/SiNx multilayer films with alternating nanocrystalline aluminum nitride (nc-AlN) and amorphous silicon nitride (a-SiNx) phases, which were formed via magnetron sputtering, are presented. The layer thickness varies from 2 to 10 nm, the total film thickness is 300 nm, and the grain size of the AlN phase corresponds to the nc-AlN layer thickness. By means of transmission electron microscopy, it is revealed that, due to 30-keV He+ ion irradiation with a dose of 5 Ч 1016 cm–2, gas pores with an average size of 2.0–2.4 nm and localized mainly in a-SiNx layers are generated within the projective range of helium ions. The appearance of such inclusions is due to the fact that implanted helium atoms migrate into the formed vacancy complexes. In this case, the structural state of AlN crystal layers remains unchanged.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2018
Subjects:
электронный ресурс
труды учёных ТПУ
multilayer films
silicon nitride
aluminum nitride
helium-ion implantation
amorphous layers
pore formation
многослойные пленки
нитрид кремния
нитрид алюминия
Online Access:https://doi.org/10.1134/S1027451018050695
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660893

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