Metal Coatings Deposition Using Hot Target Magnetrons

Metal Coatings Deposition Using Hot Target Magnetrons

Detalles Bibliográficos
Parent link:	Surface Modification of Materials by Ion Beams (SMMIB-2019): 21st International Conference, 25-30 August 2019, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU). [P. 86].— , 2019
Autor Corporativo:	Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научно-образовательный центр Б. П. Вейнберга
Outros autores:	Krivobokov V. P. Valery Pavlovich, Bleykher (Bleicher) G. A. Galina Alekseevna, Yuryeva A. V. Alena Victorovna, Sidelev D. V. Dmitry Vladimirovich
Summary:	Заглавие с экрана
Publicado:	2019
Series:	Ion-Assisted Coating Deposition. Invited Talks
Subjects:	электронный ресурс труды учёных ТПУ hot target magnetron sputtering metal coatings мишени магнетроны магнетронное распыление металлические покрытия тонкие пленки
Acceso en liña:	https://smmib.ru/assets/files/SMMIB2019_TOMSK_full.pdf#page=87
Formato:	Electrónico Capítulo de libro
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=660880

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