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|a Metal Coatings Deposition Using Hot Target Magnetrons
|f V. P. Krivobokov [et al.]
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|a Text
|c electronic
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|a Ion-Assisted Coating Deposition. Invited Talks
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|a [References: p. 86 (5 tit.)]
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|0 (RuTPU)RU\TPU\network\30793
|t Surface Modification of Materials by Ion Beams (SMMIB-2019)
|o 21st International Conference, 25-30 August 2019, Tomsk, Russia
|o abstract book
|f National Research Tomsk Polytechnic University (TPU)
|v [P. 86]
|d 2019
|
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|a электронный ресурс
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|a труды учёных ТПУ
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|a hot target
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|a magnetron sputtering
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|a metal coatings
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|a мишени
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|a магнетроны
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|a магнетронное распыление
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|a металлические покрытия
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|a тонкие пленки
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| 701 |
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|a Krivobokov
|b V. P.
|c Russian physicist
|c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc)
|f 1948-
|g Valery Pavlovich
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|a Bleykher (Bleicher)
|b G. A.
|c physicist
|c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences
|f 1961-
|g Galina Alekseevna
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|a Yuryeva
|b A. V.
|c specialist in the field of hydrogen energy and plasma technologies
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1983-
|g Alena Victorovna
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|9 17084
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|a Sidelev
|b D. V.
|c physicist
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
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|y Tomsk
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|a Национальный исследовательский Томский политехнический университет
|b Инженерная школа ядерных технологий
|b Научно-образовательный центр Б. П. Вейнберга
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|u https://smmib.ru/assets/files/SMMIB2019_TOMSK_full.pdf#page=87
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