High intensity, macroparticle-free, aluminum ion beam formation

High intensity, macroparticle-free, aluminum ion beam formation

Bibliographic Details
Parent link:Journal of Applied Physics
Vol. 123, iss. 23.— 2018.— [233301, 11 p.]
Corporate Authors: Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Научная лаборатория высокоинтенсивной имплантации ионов, Национальный исследовательский Томский политехнический университет Инженерная школа информационных технологий и робототехники Отделение информационных технологий
Other Authors: Ryabchikov A. I. Aleksandr Ilyich, Shevelev A. E. Aleksey Eduardovich, Sivin D. O. Denis Olegovich, Koval T. V. Tamara Vasilievna, Chan My Kim An
Summary:Title screen
We describe a vacuum arc based system for the generation of repetitively pulsed metal ion beams with very high current density, and the results of experimental investigations of the performance of this new system, as well as the results of numerical simulations. Our approach uses a DC vacuum arc as a metal plasma source, and the beam-forming technique is a hybrid method using features of conventional gridded ion extraction together with some plasma immersion attributes. A hemispherical grid is located some distance from the plasma source so as to intercept part of the metal plasma flow and repetitively pulse-biased to the requisite ion beam energy. Ions are accelerated in the high voltage sheath that forms in front of the biased grid and focused into a converging beam that can be of a very high current density. Space charge neutralization is provided by cold plasma that streams through the grid during the bias-off part of the cycle. At the same time, macroparticles in the vacuum arc plasma are blocked from viewing the target by a metal disk positioned centrally on the hemispherical grid. In the work outlined here, we formed 5?keV aluminum ion beams with a current density up to 470?mA/cm2 at a negative bias amplitude of 3?kV and a pulse repetition rate of 105 pulse per second. The experiments and numerical simulations demonstrate the formation of high-intensity macroparticle-free aluminum ion beams for material surface modification and other possible applications.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2018
Subjects:
электронный ресурс
труды учёных ТПУ
Online Access:https://doi.org/10.1063/1.5034082
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=659309

Similar Items

Similar Items