The Effect of Deposition Parameters on Microstructure and Mechanical Properties of Ti-Al-Ta-N coatings; AIP Conference Proceedings; Vol. 2051 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2018 (AMHS’18)

The Effect of Deposition Parameters on Microstructure and Mechanical Properties of Ti-Al-Ta-N coatings; AIP Conference Proceedings; Vol. 2051 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2018 (AMHS’18)

Bibliographic Details
Parent link:	AIP Conference Proceedings Vol. 2051 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2018 (AMHS’18).— 2018.— [020283, 4 p.]
Corporate Author:	Национальный исследовательский Томский политехнический университет Инженерная школа ядерных технологий Отделение экспериментальной физики
Other Authors:	Shugurov A. Artur, Panin A. V. Alexey Viktorovich, Akulinkin A. Alexandr, Kasterov A. Artur, Kalashnikov M. Mark, Kuzminov E. Evgenii
Summary:	Title screen The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 0.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined. Режим доступа: по договору с организацией-держателем ресурса
Language:	English
Published:	2018
Subjects:	электронный ресурс труды учёных ТПУ параметры осаждение микроструктуры механические свойства покрытия титановые подложки рентгеновская дифракция сканирующая электронная микроскопия
Online Access:	https://doi.org/10.1063/1.5083526
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=659239

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