The Effect of Deposition Parameters on Microstructure and Mechanical Properties of Ti-Al-Ta-N coatings; AIP Conference Proceedings; Vol. 2051 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2018 (AMHS’18)
| Parent link: | AIP Conference Proceedings Vol. 2051 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2018 (AMHS’18).— 2018.— [020283, 4 p.] |
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| Weitere Verfasser: | , , , , , |
| Zusammenfassung: | Title screen The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 0.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined. Режим доступа: по договору с организацией-держателем ресурса |
| Sprache: | Englisch |
| Veröffentlicht: |
2018
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| Schlagworte: | |
| Online-Zugang: | https://doi.org/10.1063/1.5083526 |
| Format: | Elektronisch Buchkapitel |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=659239 |
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| 200 | 1 | |a The Effect of Deposition Parameters on Microstructure and Mechanical Properties of Ti-Al-Ta-N coatings |f A. Shugurov [et al.] | |
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| 330 | |a The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 0.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
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| 463 | 0 | |0 (RuTPU)RU\TPU\network\27575 |t Vol. 2051 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2018 (AMHS’18) |o Proceedings of the International conference, 1–5 October 2018, Tomsk, Russia |f National Research Tomsk Polytechnic University (TPU); eds. V. E. Panin, S. G. Psakhie, V. M. Fomin |v [020283, 4 p.] |d 2018 | |
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| 701 | 1 | |a Shugurov |b A. |g Artur | |
| 701 | 1 | |a Panin |b A. V. |c physicist |c Professor of Tomsk Polytechnic University, doctor of physical and mathematical Sciences |f 1971- |g Alexey Viktorovich |3 (RuTPU)RU\TPU\pers\34630 |9 17992 | |
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| 701 | 1 | |a Kuzminov |b E. |g Evgenii | |
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