Sidelev D. V. Dmitry Vladimirovich & Krivobokov V. P. Valery Pavlovich. (2018). Angular thickness distribution and target utilization for hot Ni target magnetron sputtering; Vacuum; Vol. 160. 2018. https://doi.org/10.1016/j.vacuum.2018.12.001
Trích dẫn kiểu Chicago (xuất bản lần thứ 7)Sidelev D. V. Dmitry Vladimirovich và Krivobokov V. P. Valery Pavlovich. Angular Thickness Distribution and Target Utilization for Hot Ni Target Magnetron Sputtering; Vacuum; Vol. 160. 2018, 2018. https://doi.org/10.1016/j.vacuum.2018.12.001.
Trích dẫn kiểu MLA (xuất bản lần thứ 9)Sidelev D. V. Dmitry Vladimirovich và Krivobokov V. P. Valery Pavlovich. Angular Thickness Distribution and Target Utilization for Hot Ni Target Magnetron Sputtering; Vacuum; Vol. 160. 2018, 2018. https://doi.org/10.1016/j.vacuum.2018.12.001.