Sidelev D. V. Dmitry Vladimirovich & Krivobokov V. P. Valery Pavlovich. (2018). Angular thickness distribution and target utilization for hot Ni target magnetron sputtering. 2018. https://doi.org/10.1016/j.vacuum.2018.12.001
Citace podle Chicago (17th ed.)Sidelev D. V. Dmitry Vladimirovich a Krivobokov V. P. Valery Pavlovich. Angular Thickness Distribution and Target Utilization for Hot Ni Target Magnetron Sputtering. 2018, 2018. https://doi.org/10.1016/j.vacuum.2018.12.001.
Citace podle MLA (9th ed.)Sidelev D. V. Dmitry Vladimirovich a Krivobokov V. P. Valery Pavlovich. Angular Thickness Distribution and Target Utilization for Hot Ni Target Magnetron Sputtering. 2018, 2018. https://doi.org/10.1016/j.vacuum.2018.12.001.
Upozornění: Tyto citace jsou generovány automaticky. Nemusí být zcela správně podle citačních pravidel..