Sidelev D. V. Dmitry Vladimirovich & Krivobokov V. P. Valery Pavlovich. (2018). Angular thickness distribution and target utilization for hot Ni target magnetron sputtering; Vacuum; Vol. 160. 2018. https://doi.org/10.1016/j.vacuum.2018.12.001
Citação norma ChicagoSidelev D. V. Dmitry Vladimirovich and Krivobokov V. P. Valery Pavlovich. Angular Thickness Distribution and Target Utilization for Hot Ni Target Magnetron Sputtering; Vacuum; Vol. 160. 2018, 2018. https://doi.org/10.1016/j.vacuum.2018.12.001.
Citação norma MLASidelev D. V. Dmitry Vladimirovich and Krivobokov V. P. Valery Pavlovich. Angular Thickness Distribution and Target Utilization for Hot Ni Target Magnetron Sputtering; Vacuum; Vol. 160. 2018, 2018. https://doi.org/10.1016/j.vacuum.2018.12.001.