Irradiation of sputtered Al-Si-N coatings by pulsed 200 keV C+ion beam
| Parent link: | Vacuum Vol. 158.— 2018.— [P. 65-67] |
|---|---|
| Corporate Author: | |
| Other Authors: | , , , , , |
| Summary: | Title screen This paper reports on the effect of the irradiation of Al-Si-N coatings by an intense pulsed ion beam. The Al-Si-N coating was deposited on a steel substrate by a reactive magnetron sputtering. The Al-Si-N coating with a high silicon content (30?at.%) was irradiated by a high-intense pulsed C+ ion beam. It was shown that metastable growth defects (GDs) created in the Al-Si-N coating during deposition can be healed up by its post-deposition irradiation using several pulses (1 and 10) of C+ ions with energy Ei?=?200?keV, ion current density is?=?7 A/cm2, pulse duration tp?=?110 ns and radiation dose 2?MGy. The reduction in deposition-induced GD density results in an increased transmittance of the Al-Si-N coatings. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://doi.org/10.1016/j.vacuum.2018.09.022 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=658330 |
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| 200 | 1 | |a Irradiation of sputtered Al-Si-N coatings by pulsed 200 keV C+ion beam |f G. E. Remnev [et al.] | |
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| 330 | |a This paper reports on the effect of the irradiation of Al-Si-N coatings by an intense pulsed ion beam. The Al-Si-N coating was deposited on a steel substrate by a reactive magnetron sputtering. The Al-Si-N coating with a high silicon content (30?at.%) was irradiated by a high-intense pulsed C+ ion beam. It was shown that metastable growth defects (GDs) created in the Al-Si-N coating during deposition can be healed up by its post-deposition irradiation using several pulses (1 and 10) of C+ ions with energy Ei?=?200?keV, ion current density is?=?7 A/cm2, pulse duration tp?=?110 ns and radiation dose 2?MGy. The reduction in deposition-induced GD density results in an increased transmittance of the Al-Si-N coatings. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Vacuum | ||
| 463 | |t Vol. 158 |v [P. 65-67] |d 2018 | ||
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| 701 | 1 | |a Remnev |b G. E. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1948- |g Gennady Efimovich |3 (RuTPU)RU\TPU\pers\31500 | |
| 701 | 1 | |a Tarbokov |b V. A. |c specialist in the field of material science |c Leading engineer of Tomsk Polytechnic University, Candidate of technical sciences |f 1969- |g Vladislav Aleksandrovich |3 (RuTPU)RU\TPU\pers\41878 | |
| 701 | 1 | |a Pavlov |b S. K. |c physicist |c Engineer of Tomsk Polytechnic University |f 1990- |g Sergey Konstantinovich |3 (RuTPU)RU\TPU\pers\32875 | |
| 701 | 1 | |a Konusov |b F. V. |c physicist |c Lead Engineer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1958- |g Fedor Valerievich |3 (RuTPU)RU\TPU\pers\32570 |9 16491 | |
| 701 | 1 | |a Zenkin |b S. P. |c physicist |c Researcher of Tomsk Polytechnic University |f 1988- |g Sergey Petrovich |3 (RuTPU)RU\TPU\pers\41880 | |
| 701 | 1 | |a Musil |b Y. |c physicist |c Leading researcher of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |f 1934- |g Yindrikh |3 (RuTPU)RU\TPU\pers\36957 | |
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