Magnetron sputtering of Si-Al-N nanocomposite coatings on quartz for protection against impacts of high speed microparticles

Бібліографічні деталі
Parent link:Vacuum
Vol. 143.— 2017.— [P. 454-457]
Співавтор: Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Отделение материаловедения
Інші автори: Sergeev V. P. Viktor Petrovich, Psakhie S. G. Sergey Grigorievich, Chubik P. S. Peter Savelievich, Chernyavsky A. G. Aleksandr Grigorjevich, Solovjev V. A. Vladimir Alekseevich, Solntsev V. L. Vladimir Lvovich, Khristenko Yu. F. Yury Fedorovich
Резюме:Title screen
Nanocomposite transparent coatings on the quartz substrates based on the Si-Al-N system were formed by pulsed magnetron sputtering. The protective properties of the coatings were discovered by means of an impact of the flows of iron particles. The microparticles accelerated up to 5–8 km/s using a two-stage light-gas gun. A significant decrease in the surface density of the craters was observed on the coated quartz substrate formed under the microparticles impacts. The effect was explained by a change in the structure, phase composition and the mechanical properties of the surface layer of the quartz when a nanocomposite coating was deposited on it.
Режим доступа: по договору с организацией-держателем ресурса
Мова:Англійська
Опубліковано: 2017
Предмети:
Онлайн доступ:https://doi.org/10.1016/j.vacuum.2017.06.018
Формат: Електронний ресурс Частина з книги
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=658246

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330 |a Nanocomposite transparent coatings on the quartz substrates based on the Si-Al-N system were formed by pulsed magnetron sputtering. The protective properties of the coatings were discovered by means of an impact of the flows of iron particles. The microparticles accelerated up to 5–8 km/s using a two-stage light-gas gun. A significant decrease in the surface density of the craters was observed on the coated quartz substrate formed under the microparticles impacts. The effect was explained by a change in the structure, phase composition and the mechanical properties of the surface layer of the quartz when a nanocomposite coating was deposited on it. 
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701 1 |a Psakhie  |b S. G.  |c physicist  |c head of laboratory, Advisor to the rector, head of Department, Tomsk Polytechnic University, doctor of physico-mathematical Sciences  |f 1952-  |g Sergey Grigorievich  |3 (RuTPU)RU\TPU\pers\33038 
701 1 |a Chubik  |b P. S.  |c geologist  |c Professor, Rector of Tomsk Polytechnical University (since 2008)  |f 1954-  |g Peter Savelievich  |3 (RuTPU)RU\TPU\pers\28768 
701 1 |a Chernyavsky  |b A. G.  |g Aleksandr Grigorjevich 
701 1 |a Solovjev  |b V. A.  |g Vladimir Alekseevich 
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