Magnetron sputtering of Si-Al-N nanocomposite coatings on quartz for protection against impacts of high speed microparticles; Vacuum; Vol. 143

Bibliografiska uppgifter
Parent link:Vacuum
Vol. 143.— 2017.— [P. 454-457]
Institutionell upphovsman: Национальный исследовательский Томский политехнический университет Инженерная школа новых производственных технологий Отделение материаловедения
Övriga upphovsmän: Sergeev V. P. Viktor Petrovich, Psakhie S. G. Sergey Grigorievich, Chubik P. S. Peter Savelievich, Chernyavsky A. G. Aleksandr Grigorjevich, Solovjev V. A. Vladimir Alekseevich, Solntsev V. L. Vladimir Lvovich, Khristenko Yu. F. Yury Fedorovich
Sammanfattning:Title screen
Nanocomposite transparent coatings on the quartz substrates based on the Si-Al-N system were formed by pulsed magnetron sputtering. The protective properties of the coatings were discovered by means of an impact of the flows of iron particles. The microparticles accelerated up to 5–8 km/s using a two-stage light-gas gun. A significant decrease in the surface density of the craters was observed on the coated quartz substrate formed under the microparticles impacts. The effect was explained by a change in the structure, phase composition and the mechanical properties of the surface layer of the quartz when a nanocomposite coating was deposited on it.
Режим доступа: по договору с организацией-держателем ресурса
Språk:engelska
Publicerad: 2017
Ämnen:
Länkar:https://doi.org/10.1016/j.vacuum.2017.06.018
Materialtyp: Elektronisk Bokavsnitt
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=658246
Beskrivning
Sammanfattning:Title screen
Nanocomposite transparent coatings on the quartz substrates based on the Si-Al-N system were formed by pulsed magnetron sputtering. The protective properties of the coatings were discovered by means of an impact of the flows of iron particles. The microparticles accelerated up to 5–8 km/s using a two-stage light-gas gun. A significant decrease in the surface density of the craters was observed on the coated quartz substrate formed under the microparticles impacts. The effect was explained by a change in the structure, phase composition and the mechanical properties of the surface layer of the quartz when a nanocomposite coating was deposited on it.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.1016/j.vacuum.2017.06.018