Uglov V. V. Vladimir Vasilievich, Kvasov N. T. Nikolay Trafimovich, Remnev G. E. Gennady Efimovich, Shimanskii V. I. Vitali Igorevich, Korenevsky E. L. Egor Leonidovich, Zlotsky S. V. Sergey Vladimirovich, . . . van Vuuren A. J. Arno Janse. (2018). Size effect in AlN/SiN multilayered films irradiated with helium and argon ions. 2018. https://doi.org/10.1016/j.nimb.2018.01.012
Chicago Style (17th ed.) CitationUglov V. V. Vladimir Vasilievich, Kvasov N. T. Nikolay Trafimovich, Remnev G. E. Gennady Efimovich, Shimanskii V. I. Vitali Igorevich, Korenevsky E. L. Egor Leonidovich, Zlotsky S. V. Sergey Vladimirovich, Abadias G. Gregory, O'Connell J. H. Jacques Herman, and van Vuuren A. J. Arno Janse. Size Effect in AlN/SiN Multilayered Films Irradiated with Helium and Argon Ions. 2018, 2018. https://doi.org/10.1016/j.nimb.2018.01.012.
MLA引文Uglov V. V. Vladimir Vasilievich, et al. Size Effect in AlN/SiN Multilayered Films Irradiated with Helium and Argon Ions. 2018, 2018. https://doi.org/10.1016/j.nimb.2018.01.012.