Integrated microelectromechanical gyroscope under shock loads

Integrated microelectromechanical gyroscope under shock loads

Bibliographic Details
Parent link:IOP Conference Series: Materials Science and Engineering
Vol. 289 : Modern Technologies for Non-Destructive Testing.— 2018.— [012003, 7 p.]
Main Author: Nesterenko T. G. Tamara Georgievna
Corporate Author: Национальный исследовательский Томский политехнический университет Инженерная школа неразрушающего контроля и безопасности Отделение электронной инженерии
Other Authors: Koleda A. N. Aleksey Nikolaevich, Barbin E. S. Evgeny Sergeevich
Summary:Title screen
The paper presents a new design of a shock-proof two-axis microelectromechanical gyroscope. Without stoppers, the shock load enables the interaction between the silicon sensor elements. Stoppers were installed in the gyroscope to prevent the contact interaction between electrodes and spring elements with fixed part of the sensor. The contact of stoppers occurs along the plane, thereby preventing the system from serious contact stresses. The shock resistance of the gyroscope is improved by the increase in its eigenfrequency at which the contact interaction does not occur. It is shown that the shock load directed along one axis does not virtually cause the movement of sensing elements along the crosswise axes. Maximum stresses observed in the proposed gyroscope at any loading direction do not exceed the value allowable for silicon.
Published: 2018
Subjects:
электронный ресурс
труды учёных ТПУ
гироскопы
ударные нагрузки
дизайн
контактные напряжения
микросистемы
микроэлектромеханические системы
электроника
акселерометры
Online Access:http://dx.doi.org/10.1088/1757-899X/289/1/012003
http://earchive.tpu.ru/handle/11683/47008
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657666

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