Integrated microelectromechanical gyroscope under shock loads; IOP Conference Series: Materials Science and Engineering; Vol. 289 : Modern Technologies for Non-Destructive Testing
| Parent link: | IOP Conference Series: Materials Science and Engineering Vol. 289 : Modern Technologies for Non-Destructive Testing.— 2018.— [012003, 7 p.] |
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| Egile nagusia: | |
| Erakunde egilea: | |
| Beste egile batzuk: | , |
| Gaia: | Title screen The paper presents a new design of a shock-proof two-axis microelectromechanical gyroscope. Without stoppers, the shock load enables the interaction between the silicon sensor elements. Stoppers were installed in the gyroscope to prevent the contact interaction between electrodes and spring elements with fixed part of the sensor. The contact of stoppers occurs along the plane, thereby preventing the system from serious contact stresses. The shock resistance of the gyroscope is improved by the increase in its eigenfrequency at which the contact interaction does not occur. It is shown that the shock load directed along one axis does not virtually cause the movement of sensing elements along the crosswise axes. Maximum stresses observed in the proposed gyroscope at any loading direction do not exceed the value allowable for silicon. |
| Hizkuntza: | ingelesa |
| Argitaratua: |
2018
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| Gaiak: | |
| Sarrera elektronikoa: | http://dx.doi.org/10.1088/1757-899X/289/1/012003 http://earchive.tpu.ru/handle/11683/47008 |
| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657666 |
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| 200 | 1 | |a Integrated microelectromechanical gyroscope under shock loads |f T. G. Nesterenko, A. N. Koleda, E. S. Barbin | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 17 tit.] | ||
| 330 | |a The paper presents a new design of a shock-proof two-axis microelectromechanical gyroscope. Without stoppers, the shock load enables the interaction between the silicon sensor elements. Stoppers were installed in the gyroscope to prevent the contact interaction between electrodes and spring elements with fixed part of the sensor. The contact of stoppers occurs along the plane, thereby preventing the system from serious contact stresses. The shock resistance of the gyroscope is improved by the increase in its eigenfrequency at which the contact interaction does not occur. It is shown that the shock load directed along one axis does not virtually cause the movement of sensing elements along the crosswise axes. Maximum stresses observed in the proposed gyroscope at any loading direction do not exceed the value allowable for silicon. | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\2008 |t IOP Conference Series: Materials Science and Engineering | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\24148 |t Vol. 289 : Modern Technologies for Non-Destructive Testing |o 6th International Conference, 9–14 October 2017, Tomsk, Russian Federation |o [proceedings] |v [012003, 7 p.] |d 2018 | |
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| 610 | 1 | |a электроника | |
| 610 | 1 | |a акселерометры | |
| 700 | 1 | |a Nesterenko |b T. G. |c specialist in the field of mechanical engineering |c Associate Professor of Tomsk Polytechnic University, Candidate of technical sciences |f 1946- |g Tamara Georgievna |3 (RuTPU)RU\TPU\pers\30970 |9 15208 | |
| 701 | 1 | |a Koleda |b A. N. |c Specialist in the field of instrument making |c Engineer of Tomsk Polytechnic University |f 1985- |g Aleksey Nikolaevich |3 (RuTPU)RU\TPU\pers\33286 |9 17031 | |
| 701 | 1 | |a Barbin |b E. S. |c specialist in the field of instrument engineering |c engineer of Tomsk Polytechnic University |f 1988- |g Evgeny Sergeevich |3 (RuTPU)RU\TPU\pers\36470 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Инженерная школа неразрушающего контроля и безопасности |b Отделение электронной инженерии |3 (RuTPU)RU\TPU\col\23507 |
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