Degradation of Nitride Coatings in Low-Pressure Gas Discharge Plasma

Degradation of Nitride Coatings in Low-Pressure Gas Discharge Plasma

Bibliographic Details
Parent link:AIP Conference Proceedings
Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17).— 2017.— [020074, 4 p.]
Corporate Author: Национальный исследовательский Томский политехнический университет
Other Authors: Ivanov Yu. F. Yuriy Fedorovich, Shugurov V. Vladimir, Krysina O. Olga, Petrikova E. Elizaveta, Tolkachev O. S. Oleg Sergeevich
Summary:Title screen
The paper provides research data on the defect structure, mechanical characteristics, and tribological properties of commercially pure VT1-0 titanium exposed to surface modification on a COMPLEX laboratory electron-ion plasma setup which allows nitriding, coating deposition, and etching in low-pressure gas discharge plasma in a single vacuum cycle. It is shown that preliminary plasma nitriding forms a columnar Ti[2]N phase in VT1-0 titanium and that subsequent TiN deposition results in a thin nanocrystalline TiN layer. When the coating-substrate system is etched, the coating fails and the tribological properties of the material degrade greatly.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2017
Subjects:
электронный ресурс
труды учёных ТПУ
деградация
нитридные покрытия
газы
низкие давления
gas discharges
transition
tribology
chemical compounds
nanomaterials
газоразрядная плазма
Online Access:https://doi.org/10.1063/1.5013755
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657118

Similar Items

Similar Items