APA (7th ed.) Citation

Томский политехнический университет, Ivanov Yu. F. Yuriy Fedorovich, Shugurov V. Vladimir, Krysina O. Olga, Petrikova E. Elizaveta, & Tolkachev O. S. Oleg Sergeevich. (2017). Degradation of Nitride Coatings in Low-Pressure Gas Discharge Plasma; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017. https://doi.org/10.1063/1.5013755

Chicago Style (17th ed.) Citation

Томский политехнический университет, Ivanov Yu. F. Yuriy Fedorovich, Shugurov V. Vladimir, Krysina O. Olga, Petrikova E. Elizaveta, and Tolkachev O. S. Oleg Sergeevich. Degradation of Nitride Coatings in Low-Pressure Gas Discharge Plasma; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017, 2017. https://doi.org/10.1063/1.5013755.

MLA (9th ed.) Citation

Томский политехнический университет, et al. Degradation of Nitride Coatings in Low-Pressure Gas Discharge Plasma; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017, 2017. https://doi.org/10.1063/1.5013755.