Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17)
| Parent link: | AIP Conference Proceedings Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17).— 2017.— [020020, 4 p.] |
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| Autor corporatiu: | |
| Altres autors: | , , , |
| Sumari: | Title screen Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), [alpha]-Si[3]N[4] and [beta]-Si[3]N[4] phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ~75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (~27 GPa) along with high values of the elastic recovery coefficient (Re>=0.70). Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | anglès |
| Publicat: |
2017
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| Matèries: | |
| Accés en línia: | https://doi.org/10.1063/1.5013701 |
| Format: | MixedMaterials Electrònic Capítol de llibre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657088 |
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| 200 | 1 | |a Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System |f I. A. Bozhko [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 6 tit.] | ||
| 330 | |a Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), [alpha]-Si[3]N[4] and [beta]-Si[3]N[4] phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ~75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (~27 GPa) along with high values of the elastic recovery coefficient (Re>=0.70). | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\4816 |t AIP Conference Proceedings | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\23152 |t Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17) |o Proceedings of the International conference, 9–13 October 2017, Tomsk, Russia |f National Research Tomsk Polytechnic University (TPU); eds. V. E. Panin, S. G. Psakhie, V. M. Fomin |v [020020, 4 p.] |d 2017 | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a магнетронное осаждение | |
| 610 | 1 | |a структуры | |
| 610 | 1 | |a фазовый состав | |
| 610 | 1 | |a свойства | |
| 610 | 1 | |a покрытия | |
| 610 | 1 | |a кварцевые стекла | |
| 610 | 1 | |a рентгеновский анализ | |
| 610 | 1 | |a композиционные покрытия | |
| 610 | 1 | |a оптические свойства | |
| 610 | 1 | |a нанотвердость | |
| 610 | 1 | |a radiowave and microwave technology | |
| 610 | 1 | |a optical properties | |
| 610 | 1 | |a physical vapor deposition | |
| 701 | 1 | |a Bozhko |b I. A. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1980- |g Irina Aleksandrovna |3 (RuTPU)RU\TPU\pers\34206 |9 17740 | |
| 701 | 1 | |a Rybalko |b E. V. | |
| 701 | 1 | |a Fedorishcheva |b M. V. |c physicist |c Associate Professor of Tomsk Polytechnic University, candidate of physical and mathematical sciences |f 1958- |g Marina Vladimirovna |3 (RuTPU)RU\TPU\pers\35812 | |
| 701 | 1 | |a Sergeev |b V. P. |c specialist in the field of materials science |c Professor of Tomsk Polytechnic University, doctor of technical Sciences |f 1949- |g Viktor Petrovich |3 (RuTPU)RU\TPU\pers\32730 |9 16615 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |c (2009- ) |9 26305 |
| 801 | 2 | |a RU |b 63413507 |c 20180115 |g RCR | |
| 856 | 4 | |u https://doi.org/10.1063/1.5013701 | |
| 942 | |c CF | ||