Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System
| Parent link: | AIP Conference Proceedings Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17).— 2017.— [020020, 4 p.] |
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| Müşterek Yazar: | |
| Diğer Yazarlar: | , , , |
| Özet: | Title screen Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), [alpha]-Si[3]N[4] and [beta]-Si[3]N[4] phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ~75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (~27 GPa) along with high values of the elastic recovery coefficient (Re>=0.70). Режим доступа: по договору с организацией-держателем ресурса |
| Dil: | İngilizce |
| Baskı/Yayın Bilgisi: |
2017
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| Konular: | |
| Online Erişim: | https://doi.org/10.1063/1.5013701 |
| Materyal Türü: | Elektronik Kitap Bölümü |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657088 |
| Özet: | Title screen Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), [alpha]-Si[3]N[4] and [beta]-Si[3]N[4] phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ~75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (~27 GPa) along with high values of the elastic recovery coefficient (Re>=0.70). Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1063/1.5013701 |