Томский политехнический университет, Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Fedorishcheva M. V. Marina Vladimirovna, & Sergeev V. P. Viktor Petrovich. (2017). Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017. https://doi.org/10.1063/1.5013701
Citazione stile Chigago Style (17a edizione)Томский политехнический университет, Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Fedorishcheva M. V. Marina Vladimirovna, e Sergeev V. P. Viktor Petrovich. Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017, 2017. https://doi.org/10.1063/1.5013701.
Citatione MLA (9a ed.)Томский политехнический университет, et al. Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017, 2017. https://doi.org/10.1063/1.5013701.