APA (7th ed.) Citation

Национальный исследовательский Томский политехнический университет, Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Fedorishcheva M. V. Marina Vladimirovna, & Sergeev V. P. Viktor Petrovich. (2017). Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017. https://doi.org/10.1063/1.5013701

Chicago Style (17th ed.) Citation

Национальный исследовательский Томский политехнический университет, Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Fedorishcheva M. V. Marina Vladimirovna, and Sergeev V. P. Viktor Petrovich. Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017, 2017. https://doi.org/10.1063/1.5013701.

MLA (9th ed.) Citation

Национальный исследовательский Томский политехнический университет, et al. Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17). 2017, 2017. https://doi.org/10.1063/1.5013701.