Parfenova E. S. Elena Sergeevna & Knyazeva A. G. Anna Georgievna. (2017). The non-isothermal mathematical model of ion implantation process into the target with coating. 2017.
Chicago Style (17th ed.) CitationParfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Non-isothermal Mathematical Model of Ion Implantation Process into the Target with Coating. 2017, 2017.
MLA (9th ed.) CitationParfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Non-isothermal Mathematical Model of Ion Implantation Process into the Target with Coating. 2017, 2017.
Warning: These citations may not always be 100% accurate.