Linnik S. A. Stepan Andreevich, Okhotnikov V. V. Vitaly Vladimirovich, & Gaydaychuk A. V. Alexander Valerievich. (2017). Deposition and Patterning of Polycrystalline Diamond Films Using Traditional Photolithography and Reactive Ion Etching; Coatings; Vol. 7, iss. 9. 2017. https://doi.org/10.3390/coatings7090148
Citación estilo ChicagoLinnik S. A. Stepan Andreevich, Okhotnikov V. V. Vitaly Vladimirovich, and Gaydaychuk A. V. Alexander Valerievich. Deposition and Patterning of Polycrystalline Diamond Films Using Traditional Photolithography and Reactive Ion Etching; Coatings; Vol. 7, Iss. 9. 2017, 2017. https://doi.org/10.3390/coatings7090148.
Cita MLALinnik S. A. Stepan Andreevich, et al. Deposition and Patterning of Polycrystalline Diamond Films Using Traditional Photolithography and Reactive Ion Etching; Coatings; Vol. 7, Iss. 9. 2017, 2017. https://doi.org/10.3390/coatings7090148.