Model of the Anode Layer of a Magnetron Discharge
| Parent link: | Russian Physics Journal Vol. 45, iss. 11.— 2002.— [С. 1066-1074] |
|---|---|
| Autor principal: | |
| Altres autors: | , |
| Sumari: | Title screen The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed. Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | anglès |
| Publicat: |
2002
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| Matèries: | |
| Accés en línia: | http://dx.doi.org/10.1023/A:1023391406689 |
| Format: | Electrònic Capítol de llibre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=655666 |
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| 200 | 1 | |a Model of the Anode Layer of a Magnetron Discharge |f D. S. Rytchkov, V. P. Krivobokov, D. A. Marakassov | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [Ref.: p. 1066 (14 tit.)] | ||
| 330 | |a The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Russian Physics Journal | ||
| 463 | |t Vol. 45, iss. 11 |v [С. 1066-1074] |d 2002 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a распылительные системы | |
| 610 | 1 | |a токи | |
| 610 | 1 | |a модели | |
| 610 | 1 | |a применение | |
| 700 | 1 | |a Rytchkov |b D. S. | |
| 701 | 1 | |a Krivobokov |b V. P. |c Russian physicist |c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc) |f 1948- |g Valery Pavlovich |3 (RuTPU)RU\TPU\pers\30416 |9 14757 | |
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