The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating

The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating

Bibliographic Details
Parent link:	Key Engineering Materials: Scientific Journal Vol. 743 : High Technology: Research and Applications (HTRA 2016).— 2017.— [P. 138-141]
Main Author:	Parfenova E. S. Elena Sergeevna
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Учебно-научная межотраслевая междисциплинарная лаборатория "Моделирование физико-химических процессов в современных технологиях" (УНММЛ "МФХПСТ")
Summary:	Title screen The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. Режим доступа: по договору с организацией-держателем ресурса
Published:	2017
Subjects:	электронный ресурс труды учёных ТПУ покрытия упругие волны деформации диффузии математические модели ионная имплантация мишени coating deformation diffusion elastic wave mathematical model stress
Online Access:	http://dx.doi.org/10.4028/www.scientific.net/KEM.743.138
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=655455

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