The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating; Key Engineering Materials; Vol. 743 : High Technology: Research and Applications (HTRA 2016)
| Источник: | Key Engineering Materials: Scientific Journal Vol. 743 : High Technology: Research and Applications (HTRA 2016).— 2017.— [P. 138-141] |
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| Главный автор: | |
| Автор-организация: | |
| Примечания: | Title screen The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. Режим доступа: по договору с организацией-держателем ресурса |
| Язык: | английский |
| Опубликовано: |
2017
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| Предметы: | |
| Online-ссылка: | http://dx.doi.org/10.4028/www.scientific.net/KEM.743.138 |
| Формат: | Электронный ресурс Статья |
| Запись в KOHA: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=655455 |
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| 200 | 1 | |a The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating |f E. S. Parfenova | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 330 | |a The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\11477 |t Key Engineering Materials |o Scientific Journal | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\21014 |t Vol. 743 : High Technology: Research and Applications (HTRA 2016) |o The V International Science and Engineering Conference, Decembe 5-7, 2016, Tomsk, Russia |o [proceedings] |f National Research Tomsk Polytechnic University (TPU) ; eds. G. E. Osokin ; E. A. Kulinich |v [P. 138-141] |d 2017 | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a покрытия | |
| 610 | 1 | |a упругие волны | |
| 610 | 1 | |a деформации | |
| 610 | 1 | |a диффузии | |
| 610 | 1 | |a математические модели | |
| 610 | 1 | |a ионная имплантация | |
| 610 | 1 | |a мишени | |
| 610 | 1 | |a coating | |
| 610 | 1 | |a deformation | |
| 610 | 1 | |a diffusion | |
| 610 | 1 | |a elastic wave | |
| 610 | 1 | |a mathematical model | |
| 610 | 1 | |a stress | |
| 700 | 1 | |a Parfenova |b E. S. |c Chemical Engineer |c engineer of Tomsk Polytechnic University |f 1989- |g Elena Sergeevna |2 stltpush |3 (RuTPU)RU\TPU\pers\34500 | |
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