The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 743 : High Technology: Research and Applications (HTRA 2016).— 2017.— [P. 138-141] |
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| 企業作者: | |
| 總結: | Title screen The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. Режим доступа: по договору с организацией-держателем ресурса |
| 語言: | 英语 |
| 出版: |
2017
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| 主題: | |
| 在線閱讀: | http://dx.doi.org/10.4028/www.scientific.net/KEM.743.138 |
| 格式: | 電子 Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=655455 |
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| 200 | 1 | |a The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating |f E. S. Parfenova | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 330 | |a The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\11477 |t Key Engineering Materials |o Scientific Journal | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\21014 |t Vol. 743 : High Technology: Research and Applications (HTRA 2016) |o The V International Science and Engineering Conference, Decembe 5-7, 2016, Tomsk, Russia |o [proceedings] |f National Research Tomsk Polytechnic University (TPU) ; eds. G. E. Osokin ; E. A. Kulinich |v [P. 138-141] |d 2017 | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a покрытия | |
| 610 | 1 | |a упругие волны | |
| 610 | 1 | |a деформации | |
| 610 | 1 | |a диффузии | |
| 610 | 1 | |a математические модели | |
| 610 | 1 | |a ионная имплантация | |
| 610 | 1 | |a мишени | |
| 610 | 1 | |a coating | |
| 610 | 1 | |a deformation | |
| 610 | 1 | |a diffusion | |
| 610 | 1 | |a elastic wave | |
| 610 | 1 | |a mathematical model | |
| 610 | 1 | |a stress | |
| 700 | 1 | |a Parfenova |b E. S. |c Chemical Engineer |c engineer of Tomsk Polytechnic University |f 1989- |g Elena Sergeevna |2 stltpush |3 (RuTPU)RU\TPU\pers\34500 | |
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