The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating; Key Engineering Materials; Vol. 743 : High Technology: Research and Applications (HTRA 2016)
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 743 : High Technology: Research and Applications (HTRA 2016).— 2017.— [P. 138-141] |
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| Shrnutí: | Title screen The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. Режим доступа: по договору с организацией-держателем ресурса |
| Jazyk: | angličtina |
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2017
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| On-line přístup: | http://dx.doi.org/10.4028/www.scientific.net/KEM.743.138 |
| Médium: | Elektronický zdroj Kapitola |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=655455 |
| Shrnutí: | Title screen The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.4028/www.scientific.net/KEM.743.138 |