Parfenova E. S. Elena Sergeevna. (2017). The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating; Key Engineering Materials; Vol. 743: High Technology: Research and Applications (HTRA 2016). 2017. https://doi.org/10.4028/www.scientific.net/KEM.743.138
Chicago Style (17th ed.) CitationParfenova E. S. Elena Sergeevna. The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating; Key Engineering Materials; Vol. 743: High Technology: Research and Applications (HTRA 2016). 2017, 2017. https://doi.org/10.4028/www.scientific.net/KEM.743.138.
MLA (9th ed.) CitationParfenova E. S. Elena Sergeevna. The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating; Key Engineering Materials; Vol. 743: High Technology: Research and Applications (HTRA 2016). 2017, 2017. https://doi.org/10.4028/www.scientific.net/KEM.743.138.