The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode

The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode

Détails bibliographiques
Parent link:	Journal of Physics: Conference Series Vol. 830 : Energy Fluxes and Radiation Effects 2016.— 2017.— [012118, 5 p.]
Auteur principal:	Linnik S. A. Stepan Andreevich
Collectivité auteur:	Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1
Autres auteurs:	Gaydaychuk A. V. Alexander Valerievich, Okhotnikov V. V. Vitaly Vladimirovich
Résumé:	Title screen We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries.
Langue:	anglais
Publié:	2017
Collection:	Modification of materials with particle beams and plasma flows
Sujets:	электронный ресурс труды учёных ТПУ алмазные покрытия плазма тлеющие разряды импульсно-периодический режим алмазные пленки фазовый состав микроструктуры
Accès en ligne:	http://dx.doi.org/10.1088/1742-6596/830/1/012118 http://earchive.tpu.ru/handle/11683/39496
Format:	Électronique Chapitre de livre
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=654940

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