The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode; Journal of Physics: Conference Series; Vol. 830 : Energy Fluxes and Radiation Effects 2016
| Parent link: | Journal of Physics: Conference Series Vol. 830 : Energy Fluxes and Radiation Effects 2016.— 2017.— [012118, 5 p.] |
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| Altri autori: | , |
| Riassunto: | Title screen We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries. |
| Lingua: | inglese |
| Pubblicazione: |
2017
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| Serie: | Modification of materials with particle beams and plasma flows |
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| Accesso online: | http://dx.doi.org/10.1088/1742-6596/830/1/012118 http://earchive.tpu.ru/handle/11683/39496 |
| Natura: | Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=654940 |
| Riassunto: | Title screen We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries. |
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| DOI: | 10.1088/1742-6596/830/1/012118 |