Titanium Macroparticle Fraction Suppression with Steered Arc And Negative Pulse Biasing

Titanium Macroparticle Fraction Suppression with Steered Arc And Negative Pulse Biasing

Bibliografske podrobnosti
Parent link:	Journal of Industrial Pollution Control Vol. 32, iss. 2.— 2016.— [P. 406-410]
Korporativna značnica:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Лаборатория № 22
Drugi avtorji:	Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich, Ananin P. S. Petr Semenovich, Shevelev A. E. Aleksey Eduardovich, Shulepov I. A. Ivan Anisimovich
Izvleček:	Title screen The result of experimental study of macroparticles (MPs) accumulation on negatively biased substrate immersed in DC vacuum arc titanium plasma are presented. The influence of normal and tangential to cathode surface magnetic field and high-frequency short-pulsed negative bias has been investigated. It was shown that the application of tangential to cathode surface magnetic field instead of normal one allows to reduce titanium MP surface density 2 fold. Applying of short-pulsed bias leads to decreasing of total MPs surface density after 3 minutes of ion-plasma treatment 30 fold.
Jezik:	angleščina
Izdano:	2016
Teme:	электронный ресурс труды учёных ТПУ ionized plasma macroparticles accumulation titanium plasma magnetic field modeling ионизованная плазма микрочастицы накопления титан магнитное поле моделирование
Online dostop:	http://www.icontrolpollution.com/articles/titanium-macroparticle-fraction-suppression-with-steered-arc-and-negative-pulse-biasing-.php?aid=81681
Format:	Elektronski Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=654280

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