Aktaev N. E. Nurken Erbolatovich & Remnev G. E. Gennady Efimovich. (2016). Modeling of carbon penetration into silicon structure under the action of pulsed high-intensity ion beam. 2016. https://doi.org/10.1016/j.surfcoat.2016.04.050
Cita Chicago (17th ed.)Aktaev N. E. Nurken Erbolatovich i Remnev G. E. Gennady Efimovich. Modeling of Carbon Penetration into Silicon Structure Under the Action of Pulsed High-intensity Ion Beam. 2016, 2016. https://doi.org/10.1016/j.surfcoat.2016.04.050.
Cita MLA (9th ed.)Aktaev N. E. Nurken Erbolatovich i Remnev G. E. Gennady Efimovich. Modeling of Carbon Penetration into Silicon Structure Under the Action of Pulsed High-intensity Ion Beam. 2016, 2016. https://doi.org/10.1016/j.surfcoat.2016.04.050.
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