Magnetron sputtering with hot solid target: thermal processes and erosion; Acta Polytechnica; Vol. 56, № 6

Magnetron sputtering with hot solid target: thermal processes and erosion; Acta Polytechnica; Vol. 56, № 6

Bibliographische Detailangaben
Parent link:Acta Polytechnica: Journal of Advanced Engineering
Vol. 56, № 6.— 2016.— [P. 425-431]
Körperschaft: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра экспериментальной физики (ЭФ)
Weitere Verfasser: Borduleva A. O. Alena Olegovna, Bleykher (Bleicher) G. A. Galina Alekseevna, Sidelev D. V. Dmitry Vladimirovich, Krivobokov V. P. Valery Pavlovich
Zusammenfassung:Title screen
This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal insulation target types from the magnetron body. It was found that the presence of an evaporation component allows the rate of removal of atoms from the surface of a solid target to be increased with limited thermal conduction. A mathematical simulation was used to evaluate the contribution of evaporation to the increase in the coating deposition rate for complete and partial thermal insulation. It was found that non-uniformity of the direct-axis component of the magnetic induction vector helps to localize the heating. also increases the evaporation rate on the surface of the target. It was proved that local evaporation including sublimations on the surface of a hot target is a significant factor in increasing the coating deposition rate. Due to this mechanism, the coating deposition rate can be increased 5 times for Ti in comparison with fully cooled targets. This result can be applied for direct current magnetrons and also for pulsed systems. It was also found that evaporation increased the energy efficiency of the target erosion. The most suitable metals were selected for obtaining high-intensity emission of atoms from a solid target.
Sprache:Englisch
Veröffentlicht: 2016
Schlagworte:
электронный ресурс
труды учёных ТПУ
магнетронное распыление
мишени
испарение
скорости
осаждение
Online-Zugang:https://doi.org/10.14311/AP.2016.56.0425
Format: Elektronisch Buchkapitel
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652943

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