Simulation of the Redistribution of Ions in Ion-Magnetron Setup; AIP Conference Proceedings; Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016

Simulation of the Redistribution of Ions in Ion-Magnetron Setup; AIP Conference Proceedings; Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016

מידע ביבליוגרפי
Parent link:AIP Conference Proceedings
Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016.— 2016.— [020193, 4 p.]
מחבר ראשי: Saifullin E. Elmir
מחבר תאגידי: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Учебно-научная межотраслевая междисциплинарная лаборатория "Моделирование физико-химических процессов в современных технологиях" (УНММЛ "МФХПСТ")
מחברים אחרים: Knyazeva A. G. Anna Georgievna
סיכום:Title screen
In this paper, some features of ion redistribution in the chamber of ion-magnetron setup were studied numerically. The hydrodynamic model of two-component fully ionized plasma was taken as the basis for model construction. The assumed simplifications allowed dividing the problem into "electrical" and "hydrodynamic" parts. In term of "electrical" part of the problem, the distributions of electrical potentials and electric field intensity in the chamber were calculated. "Hydrodynamic" part includes the determination of the fields of the velocity components, pressure and concentration. It was shown that the electric field leads to the quantitative and qualitative changes in the process characteristics.
Режим доступа: по договору с организацией-держателем ресурса
שפה:אנגלית
יצא לאור: 2016
נושאים:
электронный ресурс
труды учёных ТПУ
моделирование
перераспределение
гидродинамические модели
ионизированная плазма
электрические поля
גישה מקוונת:http://dx.doi.org/10.1063/1.4966487
פורמט: אלקטרוני Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652784

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