Simulation of the Redistribution of Ions in Ion-Magnetron Setup
| Parent link: | AIP Conference Proceedings Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016.— 2016.— [020193, 4 p.] |
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| Resumo: | Title screen In this paper, some features of ion redistribution in the chamber of ion-magnetron setup were studied numerically. The hydrodynamic model of two-component fully ionized plasma was taken as the basis for model construction. The assumed simplifications allowed dividing the problem into "electrical" and "hydrodynamic" parts. In term of "electrical" part of the problem, the distributions of electrical potentials and electric field intensity in the chamber were calculated. "Hydrodynamic" part includes the determination of the fields of the velocity components, pressure and concentration. It was shown that the electric field leads to the quantitative and qualitative changes in the process characteristics. Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | inglês |
| Publicado em: |
2016
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| Acesso em linha: | http://dx.doi.org/10.1063/1.4966487 |
| Formato: | Recurso Electrónico Capítulo de Livro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652784 |
| Resumo: | Title screen In this paper, some features of ion redistribution in the chamber of ion-magnetron setup were studied numerically. The hydrodynamic model of two-component fully ionized plasma was taken as the basis for model construction. The assumed simplifications allowed dividing the problem into "electrical" and "hydrodynamic" parts. In term of "electrical" part of the problem, the distributions of electrical potentials and electric field intensity in the chamber were calculated. "Hydrodynamic" part includes the determination of the fields of the velocity components, pressure and concentration. It was shown that the electric field leads to the quantitative and qualitative changes in the process characteristics. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1063/1.4966487 |