Non-Isothermal Model of Ion Implantation with Combined Ion Beam; AIP Conference Proceedings; Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016

Non-Isothermal Model of Ion Implantation with Combined Ion Beam; AIP Conference Proceedings; Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016

Bibliographic Details
Parent link:AIP Conference Proceedings
Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016.— 2016.— [020184, 4 p.]
Main Author: Parfenova E. S. Elena Sergeevna
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Учебно-научная межотраслевая междисциплинарная лаборатория "Моделирование физико-химических процессов в современных технологиях" (УНММЛ "МФХПСТ")
Other Authors: Knyazeva A. G. Anna Georgievna
Summary:Title screen
The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2016
Subjects:
электронный ресурс
труды учёных ТПУ
ионная имплантация
ионные пучки
математические модели
металлические поверхности
деформации
подложки
коэффициент диффузии
Online Access:http://dx.doi.org/10.1063/1.4966478
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652764

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