APA (7th ed.) Citation

Parfenova E. S. Elena Sergeevna & Knyazeva A. G. Anna Georgievna. (2016). Non-Isothermal Model of Ion Implantation with Combined Ion Beam; AIP Conference Proceedings; Vol. 1783: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. 2016. https://doi.org/10.1063/1.4966478

Chicago Style (17th ed.) Citation

Parfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. Non-Isothermal Model of Ion Implantation with Combined Ion Beam; AIP Conference Proceedings; Vol. 1783: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. 2016, 2016. https://doi.org/10.1063/1.4966478.

MLA (9th ed.) Citation

Parfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. Non-Isothermal Model of Ion Implantation with Combined Ion Beam; AIP Conference Proceedings; Vol. 1783: Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. 2016, 2016. https://doi.org/10.1063/1.4966478.