Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere; Instruments and Experimental Techniques; Vol. 59, iss. 6

Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere; Instruments and Experimental Techniques; Vol. 59, iss. 6

Dades bibliogràfiques
Parent link:	Instruments and Experimental Techniques Vol. 59, iss. 6.— 2016.— [P. 818-821]
Autor corporatiu:	Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра экспериментальной физики (ЭФ)
Altres autors:	Evdokimov K. E. Kirill Evgenievich, Konishchev M. E. Maksim Evgenievich, Sun Zhilei, Pichugin V. F. Vladimir Fyodorovich
Sumari:	Title screen Probe measurements of reactive magnetron-discharge plasma were conducted in order to optimize the operating modes and predict the results of a mid-frequency magnetron sputtering system for depositing Ti–O–N compositions. A method for probe-data processing is developed. This method allows the determination of the basic plasma parameters, such as the concentration and temperature of electrons and ions. In order to reduce the impact of data errors that are due to the proximity of the probe and magnetron-source frequencies, the current–voltage characteristic was measured 50–80 times; these data are interpolated and then averaged. Режим доступа: по договору с организацией-держателем ресурса
Idioma:	anglès
Publicat:	2016
Matèries:	электронный ресурс труды учёных ТПУ магнетронные разряды плазма зонды
Accés en línia:	http://dx.doi.org/10.1134/S0020441216050055
Format:	Electrònic Capítol de llibre
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652671

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