Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere; Instruments and Experimental Techniques; Vol. 59, iss. 6

Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere; Instruments and Experimental Techniques; Vol. 59, iss. 6

Bibliographic Details
Parent link:Instruments and Experimental Techniques
Vol. 59, iss. 6.— 2016.— [P. 818-821]
Corporate Authors: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра экспериментальной физики (ЭФ)
Other Authors: Evdokimov K. E. Kirill Evgenievich, Konishchev M. E. Maksim Evgenievich, Sun Zhilei, Pichugin V. F. Vladimir Fyodorovich
Summary:Title screen
Probe measurements of reactive magnetron-discharge plasma were conducted in order to optimize the operating modes and predict the results of a mid-frequency magnetron sputtering system for depositing Ti–O–N compositions. A method for probe-data processing is developed. This method allows the determination of the basic plasma parameters, such as the concentration and temperature of electrons and ions. In order to reduce the impact of data errors that are due to the proximity of the probe and magnetron-source frequencies, the current–voltage characteristic was measured 50–80 times; these data are interpolated and then averaged.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2016
Subjects:
электронный ресурс
труды учёных ТПУ
магнетронные разряды
плазма
зонды
Online Access:http://dx.doi.org/10.1134/S0020441216050055
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652671

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