Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere; Instruments and Experimental Techniques; Vol. 59, iss. 6
| Parent link: | Instruments and Experimental Techniques Vol. 59, iss. 6.— 2016.— [P. 818-821] |
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| Corporate Authors: | , |
| Andre forfattere: | , , , |
| Summary: | Title screen Probe measurements of reactive magnetron-discharge plasma were conducted in order to optimize the operating modes and predict the results of a mid-frequency magnetron sputtering system for depositing Ti–O–N compositions. A method for probe-data processing is developed. This method allows the determination of the basic plasma parameters, such as the concentration and temperature of electrons and ions. In order to reduce the impact of data errors that are due to the proximity of the probe and magnetron-source frequencies, the current–voltage characteristic was measured 50–80 times; these data are interpolated and then averaged. Режим доступа: по договору с организацией-держателем ресурса |
| Sprog: | engelsk |
| Udgivet: |
2016
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| Fag: | |
| Online adgang: | http://dx.doi.org/10.1134/S0020441216050055 |
| Format: | Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652671 |
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| 200 | 1 | |a Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere |f K. E. Evdokimov [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 23 tit.] | ||
| 330 | |a Probe measurements of reactive magnetron-discharge plasma were conducted in order to optimize the operating modes and predict the results of a mid-frequency magnetron sputtering system for depositing Ti–O–N compositions. A method for probe-data processing is developed. This method allows the determination of the basic plasma parameters, such as the concentration and temperature of electrons and ions. In order to reduce the impact of data errors that are due to the proximity of the probe and magnetron-source frequencies, the current–voltage characteristic was measured 50–80 times; these data are interpolated and then averaged. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Instruments and Experimental Techniques | ||
| 463 | |t Vol. 59, iss. 6 |v [P. 818-821] |d 2016 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a магнетронные разряды | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a зонды | |
| 701 | 1 | |a Evdokimov |b K. E. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1976- |g Kirill Evgenievich |3 (RuTPU)RU\TPU\pers\31791 |9 15902 | |
| 701 | 1 | |a Konishchev |b M. E. |c physicist |c Senior Lecturer of Tomsk Polytechnic University |f 1987- |g Maksim Evgenievich |3 (RuTPU)RU\TPU\pers\34212 |9 17743 | |
| 701 | 0 | |a Sun Zhilei |c physicist |c Research Engineer of Tomsk Polytechnic University |f 1992- |3 (RuTPU)RU\TPU\pers\46147 | |
| 701 | 1 | |a Pichugin |b V. F. |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |c Physicist |f 1944- |g Vladimir Fyodorovich |3 (RuTPU)RU\TPU\pers\30933 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет (ТПУ) |b Институт физики высоких технологий (ИФВТ) |b Лаборатория № 1 |3 (RuTPU)RU\TPU\col\19035 |
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| 856 | 4 | |u http://dx.doi.org/10.1134/S0020441216050055 | |
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