Analysis of correctness of intense ion beam diagnostics based on the ion-current density; Instruments and Experimental Techniques; Vol. 58, iss. 5
| Parent link: | Instruments and Experimental Techniques Vol. 58, iss. 5.— 2015.— [P. 667-674] |
|---|---|
| Main Author: | |
| Other Authors: | , |
| Summary: | Title screen The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2015
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1134/S0020441215040090 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652203 |
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| 200 | 1 | |a Analysis of correctness of intense ion beam diagnostics based on the ion-current density |f A. I. Pushkarev, I. P. Khaylov, Yu. I. Isakova | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: p. 673-674 (20 tit.)] | ||
| 330 | |a The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Instruments and Experimental Techniques | ||
| 463 | |t Vol. 58, iss. 5 |v [P. 667-674] |d 2015 | ||
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| 701 | 1 | |a Khaylov |b I. P. | |
| 701 | 1 | |a Isakova |b Yu. I. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences |f 1988- |g Yulia Ivanovna |3 (RuTPU)RU\TPU\pers\32700 |9 16586 | |
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