Analysis of correctness of intense ion beam diagnostics based on the ion-current density

Chi tiết về thư mục
Parent link:Instruments and Experimental Techniques
Vol. 58, iss. 5.— 2015.— [P. 667-674]
Tác giả chính: Pushkarev A. I. Aleksandr Ivanovich
Tác giả khác: Khaylov I. P., Isakova Yu. I. Yulia Ivanovna
Tóm tắt:Title screen
The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.
Режим доступа: по договору с организацией-держателем ресурса
Được phát hành: 2015
Những chủ đề:
Truy cập trực tuyến:http://dx.doi.org/10.1134/S0020441215040090
Định dạng: Điện tử Chương của sách
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652203
Miêu tả
Tóm tắt:Title screen
The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.1134/S0020441215040090