Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering; AIP Conference Proceedings; Vol. 1772 : Prospects of Fundamental Sciences Development (PFSD-2016)

Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering; AIP Conference Proceedings; Vol. 1772 : Prospects of Fundamental Sciences Development (PFSD-2016)

Bibliographische Detailangaben
Parent link:AIP Conference Proceedings
Vol. 1772 : Prospects of Fundamental Sciences Development (PFSD-2016).— 2016.— [030014, 8 p.]
Körperschaften: Национальный исследовательский Томский политехнический университет, Национальный исследовательский Томский политехнический университет (ТПУ) Институт социально-гуманитарных технологий (ИСГТ)
Weitere Verfasser: Bozhko I. A. Irina Aleksandrovna, Rybalko E. Evgeniya, Pershukova A. Anastasiya, Fedorishcheva M. V. Marina Vladimirovna, Khristenko Yu. Yurii, Sergeev V. P. Viktor Petrovich
Zusammenfassung:Title screen
The paper presents the results of investigations of the structural and phase conditions, mechanical and optical properties of Al-Si-N system coating obtained by magnetron sputtering. The thickness of this coating ranges from 3 to 19 [mu]m and is sprayed on silica glass using magnetron sputtering technique. The formation of nanoscale AlN single phase with HCP crystal system and the crystal grain size of up to 20 nm is discovered using the X-ray diffraction method. The texture of [002] orientation is observed in the structure of Al-Si-N-based coatings. These coatings are characterized by high values of microhardness and coefficient of restitution. The transmission spectrum of the coatings are produced within the range of 190-1100 nm. Al-Si-N-based coatings are characterized by a high degree of transparency (≈ 80%) within the visible light spectrum and complete opaqueness in the ultraviolet region. The refractive index and the thickness of Al-Si-N system coating are determined using the transmission spectrum and refractive index. The refractive index of Al-Si-N-coated glass samples is determined using the transmission spectrum the value of which increases with the increase in the coating thickness.
Режим доступа: по договору с организацией-держателем ресурса
Sprache:Englisch
Veröffentlicht: 2016
Schriftenreihe:Materials structure and properties under modification
Schlagworte:
электронный ресурс
труды учёных ТПУ
микроструктуры
нанокомпозиты
покрытия
магнетронное распыление
механические свойства
оптические свойства
преломление
кварцевые стекла
Online-Zugang:http://dx.doi.org/10.1063/1.4964552
http://earchive.tpu.ru/handle/11683/34998
Format: Elektronisch Buchkapitel
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652107

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