Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode

Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode

Библиографические подробности
Источник:	Technical Physics: Scientific Journal.— , 1931- Vol. 61, iss. 5.— 2016.— [P. 690-695]
Автор-организация:	Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра экспериментальной физики
Другие авторы:	Grenadyorov A. S. Aleksandr Sergeevich, Oskomov K. V. Konstantin Vladimirovich, Soloviev (Solovyev) A. A. Andrey Aleksandrovich, Rabotkin S. V. Sergey Viktorovich
Примечания:	Title screen Amorphous hydrogenated carbon doped with silicon oxide (a-C:H:Si:O), which is referred to as silicon–carbon coatings in this work, consists of thin amorphous films, which are used as commercial solid lubricants due to their higher stability under extreme environmental conditions as compared to amorphous hydrogenated carbon. The deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode is considered. Silicon–carbon coatings are deposited using polyphenul methylsiloxane as a precursor at a flow rate of 0.05 mL/min in an argon atmosphere at a pressure of 0.1 Pa. A high-frequency power supply is used to apply a high-frequency bias voltage to a substrate during deposition. After deposition, the mechanical properties of the coatings are studied. The maximum hardness of the coating is 20 GPa at a minimum friction coefficient of 0.16 and a wear rate of 1.3 ? 10–5 mm3 N–1 m–1. Energy dispersive analysis shows that the coatings contain a significant content of carbon and oxygen (about 80 and 15%, respectively) and a low content of silicon (about 5%). Режим доступа: по договору с организацией-держателем ресурса
Опубликовано:	2016
Предметы:	электронный ресурс труды учёных ТПУ
Online-ссылка:	http://dx.doi.org/10.1134/S106378421605008X
Формат:	Электронный ресурс Статья
Запись в KOHA:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=650949

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