Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode; Technical Physics; Vol. 61, iss. 5

Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode; Technical Physics; Vol. 61, iss. 5

Podrobná bibliografie
Parent link:Technical Physics: Scientific Journal.— , 1931-
Vol. 61, iss. 5.— 2016.— [P. 690-695]
Korporativní autor: Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра экспериментальной физики
Další autoři: Grenadyorov A. S. Aleksandr Sergeevich, Oskomov K. V. Konstantin Vladimirovich, Soloviev (Solovyev) A. A. Andrey Aleksandrovich, Rabotkin S. V. Sergey Viktorovich
Shrnutí:Title screen
Amorphous hydrogenated carbon doped with silicon oxide (a-C:H:Si:O), which is referred to as silicon–carbon coatings in this work, consists of thin amorphous films, which are used as commercial solid lubricants due to their higher stability under extreme environmental conditions as compared to amorphous hydrogenated carbon. The deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode is considered. Silicon–carbon coatings are deposited using polyphenul methylsiloxane as a precursor at a flow rate of 0.05 mL/min in an argon atmosphere at a pressure of 0.1 Pa. A high-frequency power supply is used to apply a high-frequency bias voltage to a substrate during deposition. After deposition, the mechanical properties of the coatings are studied. The maximum hardness of the coating is 20 GPa at a minimum friction coefficient of 0.16 and a wear rate of 1.3 ? 10–5 mm3 N–1 m–1. Energy dispersive analysis shows that the coatings contain a significant content of carbon and oxygen (about 80 and 15%, respectively) and a low content of silicon (about 5%).
Режим доступа: по договору с организацией-держателем ресурса
Jazyk:angličtina
Vydáno: 2016
Témata:
электронный ресурс
труды учёных ТПУ
On-line přístup:http://dx.doi.org/10.1134/S106378421605008X
Médium: Elektronický zdroj Kapitola
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=650949

Podobné jednotky

Podobné jednotky