Deposition of the low resistive ITO-films by means of reactive magnetron sputtering of the In/Sn target on the cold substrate
| Parent link: | IOP Conference Series: Materials Science and Engineering Vol. 135 : Issues of Physics and Technology in Science, Industry and Medicine.— 2016.— [012055, 5 p.] |
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| Collectivité auteur: | |
| Autres auteurs: | , , , , |
| Résumé: | Title screen Detailed information on the deposition technology of the low-resistive ITO-films in oxygen-containing media by magnetron reactive sputtering from the In(90%)/Sn(10%) target on the cold substrate is given. Developed technology allows deposition ITO-films with sheet resistance transparency higher than 90%. Developed technology is notable for high reproducibility of results and is compatible with production technology of semiconductor devices of optoelectronics. |
| Langue: | anglais |
| Publié: |
2016
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| Sujets: | |
| Accès en ligne: | http://dx.doi.org/10.1088/1757-899X/135/1/012055 http://earchive.tpu.ru/handle/11683/34846 |
| Format: | Électronique Chapitre de livre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=650344 |
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| 200 | 1 | |a Deposition of the low resistive ITO-films by means of reactive magnetron sputtering of the In/Sn target on the cold substrate |f Y. S. Zhidik [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 8 tit.] | ||
| 330 | |a Detailed information on the deposition technology of the low-resistive ITO-films in oxygen-containing media by magnetron reactive sputtering from the In(90%)/Sn(10%) target on the cold substrate is given. Developed technology allows deposition ITO-films with sheet resistance transparency higher than 90%. Developed technology is notable for high reproducibility of results and is compatible with production technology of semiconductor devices of optoelectronics. | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\2008 |t IOP Conference Series: Materials Science and Engineering | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\15011 |t Vol. 135 : Issues of Physics and Technology in Science, Industry and Medicine |o VIII International Scientific Conference, 1–3 June 2016, Tomsk, Russia |o [proceedings] |v [012055, 5 p.] |d 2016 | |
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| 701 | 1 | |a Baturina |b E. V. | |
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